Mkpụrụ ndụ anyanwụ

A na-ekewa mkpụrụ ndụ anyanwụ n'ime silicon crystalline na silicon amorphous, n'etiti nke mkpụrụ ndụ silicon kristal nwere ike kewaa sel monocrystalline na sel polycrystalline;arụmọrụ nke silicon monocrystalline dị iche na nke silicon crystalline.

Nhazi:

Enwere ike kewaa mkpụrụ ndụ silicon kristal anyanwụ na China na:

Otu kristal 125 * 125

Otu kristal 156*156

Polycrystalline 156*156

Otu kristal 150 * 150

Otu kristal 103*103

Polycrystalline 125 * 125

Usoro mmepụta:

A na-ekewa usoro mmepụta nke mkpụrụ ndụ anyanwụ n'ime nyocha silicon wafer - texturing elu na pickling - diffusion junction - dephosphorization silicon glass - plasma etching and pickling - anti-reflection cover - screen printing - Rapid sintering, etc. Nkọwa dị ka ndị a:

1. Silicon wafer nnyocha

Silicon wafers bụ ndị na-ebu cell anyanwụ, na àgwà nke silicon wafers na-ekpebi kpọmkwem ngbanwe nke mkpụrụ ndụ anyanwụ.Ya mere, ọ dị mkpa iji nyochaa silicon wafers na-abata.Usoro a na-bụ-eji online mmesho nke ụfọdụ teknuzu parameters nke silicon wafers, ndị a parameters tumadi na-agụnye wafer elu unevenness, nta ụgbọelu ndụ, resistivity, P / N ụdị na microcracks, wdg Nke a otu ngwá na-ekewa n'ime akpaka loading na unloading. , Nyefe wafer silicon, akụkụ njikọ sistemu na modul nchọpụta anọ.N'ime ha, fotovoltaic silicon wafer detector na-achọpụta adịghị mma nke elu nke silicon wafer, ma n'otu oge na-achọpụta ọdịdị ọdịdị dị ka nha na diagonal nke silicon wafer;a na-eji modul nchọpụta micro-crack iji chọpụta ihe dị n'ime micro-cracks nke silicon wafer;na mgbakwunye, enwere modul nchọpụta abụọ, otu n'ime modul ule ntanetị ka a na-ejikarị iji nwalee nnukwu resistivity nke silicon wafers na ụdị silicon wafers, na nke ọzọ modul na-eji chọpụta obere ụgbọelu ndụ nke silicon wafers.Tupu achọpụta nke pere mpe na-ebu ndụ na resistivity, ọ dị mkpa ịchọpụta diagonal na micro-cracks nke silicon wafer, na-akpaghị aka na-ewepụ ihe mebiri emebi silicon wafer.Ngwa nyocha nke silicon wafer nwere ike ibunye ma budata wafer na-akpaghị aka, ma nwee ike idowe ngwaahịa na-erughị eru n'ọnọdụ a kapịrị ọnụ, si otú a na-emeziwanye nyocha na arụmọrụ.

2. Elu ederede

Nkwadebe nke udidi silicon monocrystalline bụ iji anisotropic etching nke silicon mee ọtụtụ nde pyramid tetrahedral, ya bụ, ihe owuwu pyramid, n'elu centimita silicon ọ bụla.N'ihi ọtụtụ ntụgharị uche na ntụgharị nke ìhè merenụ n'elu, mmịnye nke ìhè na-abawanye, ma na-emeziwanye arụmọrụ obere oge na ntụgharị nke batrị.Ihe ngwọta anisotropic etching nke silicon na-abụkarị ihe ngwọta alkaline na-ekpo ọkụ.Alkalis dịnụ bụ sodium hydroxide, potassium hydroxide, lithium hydroxide na ethylenediamine.A na-akwado ọtụtụ n'ime silicon suede site na iji ngwọta na-adịghị ọnụ nke sodium hydroxide na ntinye ihe dị ka 1%, na okpomọkụ etching bụ 70-85 Celsius C.Iji nweta akwa suede edo, a ga-agbakwunye mmanya ndị dị ka ethanol na isopropanol na ngwọta dị ka ihe mgbagwoju anya iji mee ka corrosion nke silicon dịkwuo elu.Tupu edozi suede, a ga-edobe wafer silicon ka ọ bụrụ ihe etching nke mbụ, na ihe dị ka 20-25 μm na-eji ihe ngwọta alkaline ma ọ bụ acidic etching.Mgbe a kpochapụrụ suede ahụ, a na-arụ ọrụ nhicha kemịkalụ n'ozuzu.A naghị echekwa ihe ndị dị n'elu silicon wafers na mmiri ruo ogologo oge iji gbochie mmetọ, na a ga-agbasasị ngwa ngwa o kwere omume.

3. eriri mgbasa

Mkpụrụ ndụ anyanwụ chọrọ njikọ PN buru ibu iji ghọta ngbanwe nke ike ọkụ na ike eletrik, na ọkụ mgbasa bụ ngwa pụrụ iche maka imepụta njikọ PN nke sel anyanwụ.Igwe ọkụ na-agbasa tubular bụ akụkụ anọ mejupụtara: akụkụ elu na nke ala nke ụgbọ mmiri quartz, ụlọ ikuku gas, akụkụ ahụ ọkụ na akụkụ gas kabinet.Mgbasa n'ozuzu na-eji isi iyi mmiri phosphorus oxychloride dị ka isi mmalite mgbasa.Tinye ụdị silicon wafer n'ime akpa quartz nke ọkụ ọkụ tubular, ma jiri nitrogen weta phosphorus oxychloride n'ime akpa quartz na okpomọkụ dị elu nke 850-900 degrees Celsius.Igwefoto oxychloride na-emeghachi omume na wafer silicon iji nweta phosphorus.atọm.Mgbe oge ụfọdụ gasịrị, atom phosphorus na-abanye n'elu oyi akwa nke silicon wafer site na gburugburu, na-abanye ma gbasaa n'ime silicon wafer site na oghere dị n'etiti atom silicon, na-eme ka interface dị n'etiti ụdị N-ụdị semiconductor na P. ụdị semiconductor, ya bụ, njikọ PN.Njikọ PN nke usoro a mepụtara nwere ezigbo ịdị n'otu, enweghị nkwekọ nke nguzogide mpempe akwụkwọ erughị 10%, na ndụ ndị pere mpe nwere ike karịa 10ms.Ịmepụta njikọ PN bụ usoro kachasị mkpa na nke dị oke egwu na mmepụta cell anyanwụ.N'ihi na ọ bụ nhazi nke njikọ PN, electrons na oghere anaghị alaghachi n'ebe mbụ ha mgbe ha na-asọpụta, nke mere na a na-emepụta ihe dị ugbu a, na-esepụta ugbu a site na waya, nke bụ kpọmkwem ugbu a.

4. Dephosphorylation silicate iko

A na-eji usoro a eme ihe na mmepụta nke mkpụrụ ndụ anyanwụ.Site na etching kemịkalụ, a na-emikpu wafer silicon n'ime mmiri hydrofluoric acid iji mepụta mmeghachi omume kemịkalụ iji mepụta ogige hexafluorosilicic dị mgbagwoju anya nke nwere ike wepu sistemu mgbasa.A oyi akwa nke phosphosilicate iko kpụrụ n'elu nke silicon wafer mgbe njikọ.N'oge usoro mgbasa ozi, POCL3 na-emeghachi omume na O2 ka ọ mepụta P2O5 nke etinyere n'elu nke silicon wafer.P2O5 na-emeghachi omume na Si iji mepụta atom SiO2 na phosphorus, N'ụzọ dị otú a, a na-emepụta oyi akwa nke SiO2 nwere ihe ndị nwere phosphorus n'elu nke silicon wafer, nke a na-akpọ phosphosilicate glass.Ngwa maka iwepu iko silicate phosphorous bụ nke isi ahụ, tankị ihicha, sistemu mbanye servo, ogwe aka igwe, sistemu njikwa eletriki na sistemụ nkesa acid akpaka.Isi mmalite ike bụ hydrofluoric acid, nitrogen, ikuku abịakọrọ, mmiri dị ọcha, ikuku ikpo ọkụ na mmiri mkpofu.Hydrofluoric acid na-agbaze silica n'ihi na hydrofluoric acid na-emeghachi omume na silica iji mepụta gas silicon tetrafluoride na-agbanwe agbanwe.Ọ bụrụ na hydrofluoric acid karịrị akarị, silicon tetrafluoride nke mmeghachi omume na-emepụta ga-emeghachi omume na hydrofluoric acid iji mepụta mgbagwoju anya, hexafluorosilicic acid.

5. Plasma etching

Ebe ọ bụ na n'oge usoro mgbasa ozi, ọ bụrụgodị na a nakweere mgbasa azụ na azụ, a ga-agbasarịrị phosphorus n'elu ebe niile gụnyere akụkụ nke wafer silicon.Eletrọnị ndị a na-emepụta foto nke anakọtara n'akụkụ ihu nke njikọ PN ga-aga n'akụkụ ebe nsọtụ ebe a na-agbasa phosphorus n'akụkụ azụ nke njikọ PN, na-eme ka obere okirikiri.Ya mere, silicon doped gburugburu cell anyanwụ ga-abụ nke etched iji wepụ PN junction na cell onu.A na-emekarị usoro a site na iji usoro etching plasma.Plasma etching nọ na ọnọdụ nrụgide dị ala, ụmụ irighiri ihe nne na nna nke gas reactive CF4 na-enwe obi ụtọ site na ike ugboro redio iji mepụta ionization na imepụta plasma.Plasma bụ electrons na ion chaja mejupụtara.N'okpuru mmetụta nke electrons, gas dị n'ime ụlọ mmeghachi omume nwere ike ịmịnye ike ma mepụta ọnụ ọgụgụ dị ukwuu nke ìgwè ndị na-arụ ọrụ na mgbakwunye na ịtụgharị n'ime ion.Ndị na-arụ ọrụ reactive dị iche iche na-eru n'elu SiO2 n'ihi mgbasa ma ọ bụ n'okpuru ọrụ nke eletrik eletrik, ebe ha na-emeghachi omume na elu nke ihe a ga-etched, na-emepụta ngwaahịa mmeghachi omume na-agbanwe agbanwe nke na-ekewapụ n'elu ihe a ga-abụ. akpụrụ akpụ, ma na-esi n'ime oghere na-ebupụta ya site na usoro agụụ.

6. Mkpuchi mgbochi ntụgharị

Ngosipụta nke elu silicon a na-egbu maramara bụ 35%.Iji belata ntụgharị ihu elu ma melite arụmọrụ ntughari nke cell, ọ dị mkpa itinye akwa mkpuchi silicon nitride anti-reflection film.Na mmepụta mmepụta ihe, a na-ejikarị ngwá ọrụ PECVD akwadebe ihe nkiri na-emegide echiche.PECVD bụ ntinye kemịkalụ kemịkalụ kwalitere.Ụkpụrụ ọrụ ya bụ iji plasma na-ekpo ọkụ dị ka isi iyi ike, a na-etinye ihe nlele ahụ na cathode nke ọkụ na-egbuke egbuke n'okpuru nrụgide dị ala, a na-eji ọkụ na-egbuke egbuke mee ihe iji kpoo ihe nlele ahụ na okpomọkụ a kara aka, wee bụrụ ego kwesịrị ekwesị. A na-ewebata gas arụ ọrụ SiH4 na NH3.Mgbe usoro mmeghachi omume kemịkalụ na mmeghachi omume plasma gasịrị, a na-emepụta ihe nkiri siri ike, ya bụ, ihe nkiri silicon nitride, n'elu ihe nlele ahụ.N'ozuzu, ọkpụrụkpụ nke ihe nkiri na-edobere site na nke a kemịkalụ kemịkalụ ụzọ nkwụnye ego na-akwalite bụ ihe 70 nm.Ihe nkiri nke ọkpụrụkpụ a nwere ọrụ anya.N'iji ụkpụrụ nke nnyonye anya ihe nkiri dị mkpa, ihe ngosi nke ìhè nwere ike ibelata nke ukwuu, obere oge na mmepụta batrị na-abawanye nke ukwuu, na-arụkwa ọrụ nke ọma.

7. mbipụta ihuenyo

Mgbe cell anyanwụ gafeworo usoro nke ederede, mgbasa ozi na PECVD, e mepụtala njikọ PN, nke nwere ike ịmepụta ugbu a n'okpuru ìhè.Iji bupụ ihe na-emepụta ugbu a, ọ dị mkpa iji mee ka electrodes dị mma na nke na-adịghị mma n'elu batrị ahụ.Enwere ọtụtụ ụzọ isi mee electrodes, na mbipụta ihuenyo bụ usoro mmepụta ihe na-emekarị maka ime electrodes nke anyanwụ.Mbipụta ihuenyo bụ ibipụta ụkpụrụ ekpebiela n'elu mkpụrụ ahụ site n'itinye ihe.Ngwá ọrụ ahụ nwere akụkụ atọ: ọlaọcha-aluminom tapawa ebipụta n'azụ batrị, aluminom na-ebi akwụkwọ n'azụ batrị, na ọlaọcha-paste obibi n'ihu batrị.Ụkpụrụ ọrụ ya bụ: jiri ntupu nke ụkpụrụ ihuenyo banye n'ime slurry, tinye ụfọdụ nrụgide na akụkụ slurry nke ihuenyo na scraper, ma gaa na njedebe nke ọzọ nke ihuenyo n'otu oge ahụ.A na-amanye ink ahụ site na ntupu nke akụkụ eserese n'elu mkpụrụ site na squeegee ka ọ na-aga.N'ihi mmetụta viscous nke tapawa ahụ, a na-edozi akara n'ime ihe dị iche iche, na squeegee na-enwekarị kọntaktị linear na mpempe akwụkwọ ihuenyo na mkpụrụ n'oge a na-ebipụta akwụkwọ, na kọntaktị na-agagharị na mmegharị nke squeegee iji wuchaa. strok ibipụta.

8. ngwa ngwa sintering

Enweghị ike iji wafer silicon e biri ebi ozugbo.Ọ dị mkpa ka a na-agbanye ya ngwa ngwa n'ime ọkụ na-ekpo ọkụ iji kpoo ihe nkedo resin organic, na-ahapụ ihe fọrọ nke nta ka ọ bụrụ electrodes ọlaọcha dị ọcha nke na-ejikọta ya na silicon wafer n'ihi omume nke iko.Mgbe okpomọkụ nke ọla ọcha na silicon kristal ruru okpomọkụ eutectic, a na-ejikọta atom silicon kristal n'ime ihe electrode ọlaọcha a wụrụ awụ n'otu akụkụ, si otú a na-eme ka kọntaktị ohmic nke electrodes elu na nke ala, ma na-emezigharị oghere oghere. voltaji na ndochi ihe nke cell.Isi ihe dị mkpa bụ ime ka ọ nwee njirimara nguzogide iji melite arụmọrụ ntụgharị nke cell.

A na-ekewa ọkụ ọkụ na-ekpo ọkụ n'ime ụzọ atọ: tupu ịmalite, nsị, na oyi.Ebumnuche nke ogbo a na-ebute ụzọ bụ iji decompose na ọkụ ihe nkedo polymer na slurry, na okpomọkụ na-ebili nwayọọ nwayọọ na nke a;N'ebe a na-agbagharị agbagharị, mmeghachi omume anụ ahụ na nke kemịkal dị iche iche na-emecha n'ime ahụ nke e mebiri emebi iji mepụta usoro ihe nkiri na-eguzogide, na-eme ka ọ bụrụ ihe na-eguzogide n'ezie., okpomọkụ na-erute ọnụ ọgụgụ kasị elu na nke a;na ọkwa dị jụụ na nke dị jụụ, a na-eme ka iko ahụ dị jụụ, na-eme ka ọ sie ike ma sie ike, nke mere na ihe nkiri ihe nkiri na-eguzogide na-adabere na mkpụrụ.

9. Peripherals

N'ime usoro mmepụta cell, a na-achọkwa ihe ndị dị n'akụkụ dị ka ọkụ ọkụ, ọkụ, mmiri mmiri, drainage, HVAC, vacuum, na uzuoku pụrụ iche.Nchekwa ọkụ na ihe nchekwa gburugburu ebe obibi dịkwa mkpa karịsịa iji hụ na nchekwa na mmepe mmepe.N'ihi na a anyanwụ cell mmepụta akara na kwa afọ mmepụta nke 50MW, ike oriri nke usoro na ike akụrụngwa naanị bụ banyere 1800KW.Ọnụ ọgụgụ nke usoro mmiri dị ọcha bụ ihe dị ka tọn 15 kwa elekere, na ihe ndị chọrọ mmiri dị mma na-ezute ụkpụrụ teknụzụ EW-1 nke mmiri ọkụ eletrik nke China GB / T11446.1-1997.The ego nke usoro jụrụ mmiri bụkwa banyere 15 ton kwa awa, urughuru size na mmiri àgwà ekwesịghị ịbụ ihe karịrị 10 microns, na mmiri ọkọnọ okpomọkụ kwesịrị 15-20 Celsius C.Olu iyuzucha ikuku bụ ihe dịka 300M3/H.N'otu oge ahụ, ihe dị ka mita 20 nke tankị nchekwa nitrogen na cubic mita 10 nke tankị nchekwa oxygen na-achọkwa.N'iburu n'uche ihe nchebe nke gas pụrụ iche dị ka silane, ọ dịkwa mkpa ịtọlite ​​​​ọnụ ụlọ gas pụrụ iche iji hụ na nchekwa nchekwa zuru oke.Na mgbakwunye, ụlọ elu ọkụ silane na ebe a na-ahụ maka nsị mmiri bụkwa ihe dị mkpa maka mmepụta cell.